Dec 1 2010
Bruker, provider of high-performance scientific devices, has introduced a new optical surface profiler mode at the Materials Research Society (MRS) Fall 2010 Meeting.
The AcuityXR optical surface profiler mode integrates Bruker’s software and hardware technology to allow specific ContourGT 3D optical surface profilers to obtain higher optical diffraction limits and provide high lateral resolutions.
Bruker
Numerous nanoscale applications in the precision machining, medical, and semiconductor fields have surface defects and features with dimensions that restrict the identification or detection because of the optical diffraction limit. The minute defects and features affect the manufacturing yields, quality, performance and/or function. Bruker’s optical surface profiler solutions with the AcuityXR mode have displayed resolutions below 130 nm in width.
The AcuityXR mode, in addition to enabling high precision levels, protects the wide field-of-view and the advantages of 3D optical surface profiling. The AcuityXR enhances the dimensional repeatability on thin structures by over a 5x factor. It also has the capability to show high-quality fine features. AcuityXR is available on the ContourGT-X8, X3, and K1 optical surface profilers.
Bruker’s VP of the Stylus & Optical Metrology Unit, Ross Q. Smith stated that the AcuityXR mode integrates measurement algorithms with the improved metrology hardware technologies in the ContourGT systems to provide high lateral resolutions.