May 23 2018
LayTec proudly announces that Visual Photonics Epitaxy Co. Ltd. (VPEC) of Taiwan has chosen LayTec’s advanced in-situ metrology products for its VCSEL production. Supporting the global VCSEL chip demand for 3D sensing and other rapidly growing applications, LayTec’s dedicated VCSEL Add-On to EpiTT and EpiCurve® TT provides additional in-situ spectral reflectance sensing and can be customized in wavelength range for GaAs based and InP based NIR / IR VCSEL processes. It enables high-yield manufacturing of these very complex multi-layer device structures.
The LayTec VCSEL Add-On is also available as an upgrade to existing EpiTT or EpiCurve® TT systems. Equipped with advanced real-time analysis algorithms it monitors DBR stop-bands and cavity dip position during VCSEL epitaxy in addition to EpiTT’s wafer temperature and growth rate, as well as EpiCurve® TT’s wafer bow measurements.
Neil Chen (VPEC – President office SVP): “VPEC has choosen LayTec’s market leading in-situ process technology for VCSEL wafer manufacturing as an essential part for accomplishing our high standards in quality and yield. Combining existing control of wafer temperature, wafer bow and growth rates with the new spectral monitoring capabilities is a key for VCSEL foundries in terms of process transfer, rapid recipe changes and scaling up.”
Volker Blank (LayTec - director marketing & sales): “LayTec is honored that the globally leading GaAs foundry VPEC, with its high standard in manufacturing of VCSEL wafers for 3D sensing, automotive and other application, chooses LayTec’s advanced inspection systems to deliver highest quality. Tight process control is here the key to success.”