Feb 13 2008
Akrion, Inc., a supplier of semiconductor surface preparation equipment, recently received a purchase order for a single-wafer Velocity(TM) system from a manufacturer of Logic devices in Asia. Logic gates are present in a variety of integrated circuits used for electronic devices such as digital cameras, MP3 players and DVD recorders. The six-chamber Velocity will perform BEOL particle removal on the IMD (intermetal dielectric) layer in a Cu manufacturing process line.
Akrion offers various combinations of technologies for the Velocity platform including patented frontside and backside megasonics, along with JetStream(TM) spray, direct chemical dispense and watermark-free drying via the Sahara(TM) dryer. Akrion's process engineering team uses these technologies in various combinations to develop recipes specific to customer needs.
"Velocity's particle removal capability makes it a valuable tool for a great number of applications for manufacturers of NAND flash, DRAM, Logic, reclaimed silicon wafers and other products," said James S. Molinaro, Akrion president and CEO.