Nov 23 2010
Leica Microsystems, manufacturer of precision optical systems, announced that it has rolled out the Leica DM12000 M and the Leica DM8000 M optical inspection microscopes for 12” or 8” wafers.
DM8000 M Optical Inspection Microscope
Leica stated that the DM12000 M and DM8000 M microscope’s integrated macro mode offers a maximum of four times better field of view, when compared to the traditional scanning objectives.
LED illumination is combined in the Leica DM12000 M and DM8000 M stand that enables low power consumption. The i-line UV illumination is also based on LED illumination. The UV mode integrates i-line UV light with oblique illumination that enables swift sample viewing from all directions in ultrahigh and 3D resolution.
Leica provides the DM12000 M and the DM8000 M as a comprehensive system of software, camera, and microscope. The system can be upgraded with review and inspection software options. It can also be connected to wafer loaders of numerous brands.