Veeco Instruments has recently unveiled three new models of its innovative TurboDisc metal organic chemical vapor deposition (MOCVD) systems. The latest models are TurboDisc MaxBright M, TurboDisc K465i HP and TurboDisc MaxBright MHP that will support the manufacture of high brightness light emitting diodes (LEDs).
The MaxBright MHP provides as much as 20% within-wafer wavelength uniformity improvement over MaxBright. (Photo: Business Wire)
MaxBright M is a novel version of Veeco’s multi-reactor system, which is modular as well as compact. The MaxBright M ensures simple service and easy maintenance in addition to up to 15% more footprint efficiency than MaxBright. Furthermore, it features more versatile layout configuration to furnish a variety of fab spacing requirements.
K465i HP is Veeco’s single-reactor MOCVD system. This high performance solution is capable of generating as much as 20% within-wafer wavelength uniformity enhancement than the K465i and also offers reduced cost of ownership.
MaxBright MHP is a highly efficient version of the new modular ‘M’. This new version ensures up to 20% within-wafer wavelength uniformity efficiency compared to MaxBright. Technological advancements lead to enhanced thermal and flow capability that ultimately results in higher yields. The MaxBright MHP offers lower cost of ownership over MaxBright.
The three new systems are being offered in 2-, 4-, 6- and 8-in configurations. The MaxBright and K465i systems that are currently available can be field-upgradeable to the high performance HP option. Low maintenance TurboDisc technology forms the basis of all of Veeco’s MOCVD systems that allow maximum throughput as well as system availability.