Harrick Scientific Products offers the WafIR™, an innovative horizontal ATR accessory designed for the analysis of thin coatings on polished wafers. It utilizes a silicon crystal at a 45° incident angle to efficiently couple light into and out of the wafers.
The WafIR features a pressure applicator equipped with pressure pads, ensuring excellent contact even when the smallest contact area is beyond the region being measured. A slip clutch integrated into the pressure applicator limits the maximum force exerted on the sample. This design allows for the use of a torque wrench to achieve consistent and reproducible results.
The accessory is fully enclosed to facilitate rapid purging and is compatible with a wide range of FTIR spectrometers.
Key Features
- Exclusive pressure applicator, including pads, ensures minimal contact with the sample
- Fixed incident angle of 45°
- Integrated slip-clutch restricts the total force exerted on the sample
- Multiple reflections ensure high sensitivity
- Non-contact sampling technique: contact with the coupling crystal occurs external to the measured area
- It offers 33 reflections from the coated surface for a wafer with a thickness of 0.770 mm
- PermaPurgeTM enables a quick exchange of samples without any interruption to the purge
- Silicon coupling crystal can be replaced
- The equipment can be easily aligned and used
- Wafers measuring from 52 x 10 mm up to 203 mm (8″) in diameter are accommodated by the unobstructed, horizontal sampling surface
Includes
- Hardware that is compatible with the given spectrometer
- Silicon coupling crystal-integrated WafIR