Oct 2 2008
Cymer, Inc., the market's leading developer of light sources used to pattern advanced semiconductor chips, announced today that Berthold Leibinger Stiftung, a non-profit German foundation also dedicated to recognizing technical innovations in laser technology, has awarded two of Cymer's researchers with a "Berthold Leibinger Innovationspreis" award. Dr. Rick Sandstrom, Cymer's co-founder and chief technical advisor; and Dr. Bill Partlo, Cymer's senior vice president and chief technical officer, were recognized for their groundbreaking work developing and advancing the company's deep ultraviolet (DUV) excimer lasers, which are used for advanced microlithography.
The Berthold Leibinger Innovationspreis prizes are awarded every two years and recognize innovation in the application or generation of laser light. Determined by an international jury of laser experts, medical doctors and former business executives, the award was presented to Sandstrom and Partlo for their development of the excimer laser as a production tool for use in mass production of high performance semiconductors.
"The Berthold Leibinger Innovationspreis is internationally recognized as one of the most prestigious honors within the laser community; this year's recipients from Cymer—a pioneer in the industry renown for its laser light source development—are a perfect choice and represent excellence in innovation," said Sven Ederer, project manager, awards, Berthold Leibinger Stiftung.
The award was presented to Sandstrom and Partlo during a ceremony held in Ditzingen, Germany on Sept. 15.