Jan 27 2011
KLA-Tencor announced that it has unveiled a new automated analysis and defect data management solution to improve the LED yield. The company has also introduced a new wafer inspection tool that allows LED device manufacturers to increase the reliability of LED devices and reduce their manufacturing costs.
The KLARITY LED defect data management system offers a high-performance solution for LED unit manufacturers. It features a front-end to back-end connectivity, enabling the system to deliver swifter root-cause analysis and excursion identification and allow efficient decision making. These aspects help in decreasing material risk impact and enhance production. The KLARITY LED has enabled KLA-Tencor to offer a sophisticated in-line alternative solution for analyzing LED production procedures.
The defect data management system has a sophisticated defect source analysis system that automates the root cause analysis process and offers versatile graphical analysis of adder and common defects. It also features a spatial signature analysis software that leverages stack wafer signatures, tracks dynamic signature count and recognizes spatial signatures to detect the root cause for rapid detection and remedial action.
The ICOS WI-2220 optical wafer inspection tool allows LED manufacturers to boost yields and reduce production expenditures. The tool allows LED manufacturers to automate inspection process of small and large die sizes. It enables defect inspection of diced and whole wafers up to 200 mm.
The ICOS WI-2220 tool offers sensitivity to key defects and decreases the noise caused by process variations. It provides sophisticated metrology capabilities, advanced optic filtering and low-image distortion.