The Angstrom Sun Technologies Integrated Solution for In-Line Film Thickness Monitoring with Spectroscopic Reflectometer is an easy to use system for monitoring film thickness and refractive index.
Features
features of the In-Line Film Thickness Monitoring system include:
- Low cost
- Easy to set up
- Easy to operate with Window based software
- Advanced optics design for best system performance
- Array based detector system to ensure fast measurement
- Uniquely designed light source for better intensity stability
- Real time or in-line Monitoring film thickness and Refractive Index up to 5 layers
- Multiple Channel/Multiple Sites Simultaneous Measurement
- System comes with comprehensive optical constants database and library
- Configurable to MSP (Microspectrophotometer) system, SRM Mapping system
- Apply to many different type of substrates with different thickness
- RS232 Protocol for Host Control
- Auto log spectrum, thickness results and fitting graphs
- Advanced Global ZR model allows to extract local desired information from Large Spot Area Measurement over the patterned structure such as IMD, ILD1, ILD3 etc.
Applications
The In-Line Film Thickness Monitoring system is suited to applications such as:
- Semiconductor fabrication (PR, Oxide, Nitride..)
- Liquid crystal display (ITO, PR, Cell gap…..)
- Solar Cell industry
- Inks, Mineralogy, Pigments, Toners
- Pharmaceuticals, Medial Devices
- Optical coatings, TiO2, SiO2, Ta2O5…..
- Semiconductor compounds
- Functional films in MEMS/MOEMS
- Amorphous, nano and crystalline Si