The IR-VASE® is the first and only spectroscopic ellipsometer to cover
the spectral range from 2 to 30 microns (333 to 5000 wavenumbers). The IR-VASE
can determine both n and k for materials over the entire width of the spectral
range without extrapolating data outside the measured range, as with a Kramers-Kronig
analysis. Like other Woollam ellipsometers, the IR-VASE is perfect for thin
films or bulk materials including dielectrics, semiconductors, polymers, and
metals.
Why an IR-VASE?
- Non-destructive Characterization
The IR-VASE offers non-contact measurements of many different material
properties including thickness optical constants, material composition, chemical
bonding, doping concentration, and more. Measurements do not require vacuum
and can be used to study liquid/solid interfaces common in biology and chemistry
applications.
- No Baseline or Reference Sample Required
Ellipsometry is a modulation technique that does not require scans
or reference samples to maintain accuracy. Even samples that are smaller than
the beam diameter can be measured because the entire beam does not need to
be collected.
- Highly Accurate Measurement
Patented calibration and data acquisition procedures remove effects
of imperfect optical elements to provide accurate measurements of Ø and
Ä.